Temperature-dependent internal friction in silicon nanoelectromechanical systems
نویسندگان
چکیده
منابع مشابه
Temperature-dependent internal friction in silicon nanoelectromechanical systems
We report the temperature-dependent mechanical properties of nanofabricated silicon resonators operating in the megahertz range. Reduction of temperature leads to an increase of the resonant frequencies of up to 6.5%. Quality factors as high as 1000 and 2500 are observed at room temperature in metallized and nonmetallized devices, respectively. Although device metallization increases the overal...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2000
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.1316071